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Will accelerate DSA activities at imec’s recent 300mm fab-compatible DSA process line
July 12, 2012
By: DAVID SAVASTANO
Editor, Ink World Magazine
imec and Tokyo Electron (TEL) announced they will accelerate their Directed Self-Assembly (DSA) activities at imec’s recent 300mm fab-compatible DSA process line. Over the past two years, both companies have been actively engaged in DSA development. Based on promising results achieved on imec’s 300mm DSA process line, imec and TEL will now expand their focus to explore DSA as a cost-effective and manufacturing viable patterning technique for 2x and beyond technologies. Recent evaluations have...
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